Sign In. Access provided by: anon Sign Out. Design, optimization, analysis and control topics in nanotechnology ad MEMS courses Abstract: This paper discusses the use of a systems theory, design coverage and control topics in nanotechnology and microelectromechanical systems MEMS courses developed and offered in the College of Engineering in RIT. The multidisciplinary nano and microengineering have accomplished a phenomenal growth over the last twenty years due to the rapid advances in microelectronics, molecular technologies, bulk and surface micromachining, computer-aided-design CAD , etc.
Nano- and micro-electromechanical systems: fundamentals of nano- and microengineering
Recent fundamental and applied research and developments in molecular electronics and informatics have been notably contributed to the current progress. These prominent developments largely depend on modern engineering and science providing the end-users with the needed technologies and design concurrency. With the increasing demands in high-performance envisioned nanosystems and emerged microsystems, designers apply new concepts.
The role of nanotechnology and MEMS courses in the engineering curriculum is examined.
The MEMS curriculum consists of three courses, e. We stress the need for systems theory, in addition to basic fundamentals coverage and fabrication emphasis.
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